Application of Fracture Mechanics to Micromechanics and Microsystem Technology

Internal ID	18
Author(s)	Michel, B.; Sommer, J.-P.; Großer, V.
Where published?	Advances in Fracture Research and Structural Integrity, ed. V.V. Panasyuk et. al.; Pergamon Press
Year	1994
Page(s)	683 - 690