Evaluation microdefected structures by AFM-based deformation measurement

Internal ID	59
Author(s)	Vogel,D., Keller,J., Gollhardt,A., Michel,B.
Where published?	Proc. SPIE, vol. 5045, ed. N.Meyendorf, G.Y. Baaklini, and B.Michel, San Diego
Year	2003
Page(s)	1-12