Micro-Deformation Analysis and Reliability Estimation of Micro-Components by Means of NanoDAC Technique
Internal ID
85
Author(s)
Michel,B.; Keller, J.
Where published?
in:E.Suhir,Y.C. Lee, C.P. Wong (eds.) : Micro- and Opto-Electronic Materials and Structures, vol .2; Springwer Science and Business Media Inc.-, New York