Three-Dimensional Deformation Analysis of MEMS/NEMS by means of x-Ray Computer Tomography

Internal ID	186
Author(s)	Hammacher, J.;Dost, M.;Faust., W.; Scheiter, L.; Erb, R.; Michel, B.
Event	Microtech/Nanotech 2011, Symposium Micro- and Nanoreliability
Location	Boston, USA
Date	13.06.2011
End date	16.06.2011