| Experimentelle und numerische Deformationsanalyse an Komponenten der Mikros... |
Michel, B.;... |
Deutscher Verband für... |
1994 |
122 - 125 |
| Experimental Mechanics on the Way from Micro to Nano |
Michel, B. |
Experimental Technique, vol.... |
2005 |
3-5 |
| Experimental and Numerical Investigations of Thermomechanically Stressed Mi... |
Michel, B.;... |
Micro System Technologies 1 |
1994 |
14 - 22 |
| Experimental and Numerical Deformation Analysis on Components of Microsyste... |
Michel, B.;... |
Proc. 1st European Conf. on... |
1994 |
122 - 124 |
| Evaluation of Microdeformations and Fracture Quantities by Means of Micro M... |
Michel, B.;... |
Proc. 10th Intern. Conf.... |
1994 |
39 - 44 |
| Evaluation microdefected structures by AFM-based deformation measurement |
Vogel,D.,... |
Proc. SPIE, vol. 5045, ed.... |
2003 |
1-12 |
| EUCEMAN- The European Center on Micro-Nano-Reliability |
Michel, B.;... |
Publication of LIFIS, Leibniz... |
2012 |
1-5 |
| EUCEMAN- The European Center for Microreliability and Nanoreliability |
Michel, B. |
MST News Berlin No 4/08 |
2008 |
41 |
| EUCEMAN- The European Center for Microreliability and Nanoreliability |
Michel, B. |
MST News Berlin No 4/08 |
2008 |
41 |
| EUCEMAN- The European Center for Microreliability and Nanoreliability |
Michel,B.;... |
Micromaterials &... |
2007 |
92-93 |
| EUCEMAN- The European Center for MicroNanoReliability Research in Europe |
Michel, B.;... |
Smart Systems Integration for... |
2014 |
703-708 |
| Erhöhung der Zuverlässigkeit von Mikro- und Nanokomponenten und Systemen du... |
Michel,... |
Microelectronic Packaging in... |
2014 |
309-312 |
| Eigenspannungen in Werkstoffverbunden der Mikrosystemtechnik |
Michel, B. |
Proc. Tagung... |
1995 |
96 |
| Eigenspannungen in Verbundwerkstoffen der Mikrosystemtechnik |
Michel, B. |
in: G. Ziegler,... |
1996 |
223 - 224 |
| Editorial for invited paper
"RF MEMS:An Enabling Technology for Modern Wir... |
Michel,B. |
Microsystem Technologies voll... |
2015 |
1 |
