Application of Solid Mechanics in the Fields of Microelectronics and Micro System Technology

Interne ID	23
Autor(en)	Michel, B.; Sommer, J.-P.
Wo veröffentlicht?	2nd European Solid Mechanics Conference, Sept. 12-16, 1994, Proc. Euromech, Genoa, Italy
Jahr	1994
Seite(n)	N9