Monte Carlo simulation of x-ray scattering and diffraction at packaged 3d microsystems

Interne ID	206
Autor(en)	Zschenderlein, U.; Wunderle, B.; Michel, B.
Veranstaltung	MSE-Materials Science and Engineering Congress, Symposium D3, Reliability
Ort	Darmstadt
Datum	25.09.2012
Enddatum	27.09.2012