micro Materials Center Berlin, Reliability Research for MEMS

Interne ID	19
Autor(en)	Michel, B.; Winkler, T.
Veranstaltung	Int. Symp. SPIE, Conf. Nondestructive Evaluation of Micro- and Nanomaterial Systems
Ort	San Diego, USA
Datum	18.03.2002
Enddatum	20.03.2002