Three-Dimensional Deformation Analysis of MEMS/NEMS by means of x-Ray Computer Tomography

Interne ID	186
Autor(en)	Hammacher, J.;Dost, M.;Faust., W.; Scheiter, L.; Erb, R.; Michel, B.
Veranstaltung	Microtech/Nanotech 2011, Symposium Micro- and Nanoreliability
Ort	Boston, USA
Datum	13.06.2011
Enddatum	16.06.2011